An Inventional De-Embedding Technique for Signal Leakage up to 110GHz

Abstract

An inventional de-embedding technique is presented in this letter for signal leakage up to 110GHz. Specifically, it used open and short structures without needing additional de-embedding structures. It equates RF signal pad to ground as Rsub and Csub connected in parallel and then connected in series with Cox compared with traditional open short de-embedding, which equates the RF signal pad to ground as a lumped capacitance and is no longer applicable when the frequency exceeds 10GHz due to the signal leaking from the RF signal pad to the psub ground. The proposed de-embedding technique has been validated on RF parameters of NMOS device up to 110 GHz with physical trend and 34.3% improvement in de-embedding accuracy.